Fast and Accurate, Full Digital RF Matcher

Experience precision, fast response impedance control technology in microscale

Full Digital Matching Algorithm

RF Matching Network equipment, which is essentially accompanied with RF Generator equipment, requires precise technology for stable performance. Full Digital Matching Algorithm technology developed by YOUNGSIN-RF Co., Ltd. is very fast and precise.

  • Impedance control algorithm consisting of own technology

  • Equipped with exclusive MCU by YOUNSIN-RF Co., Ltd.

  • RF Matching-Point memory function and Pre-set save function

  • Real-Time Impedance monitoring in the Smith Chart

YSR’s RF Matching Network Units

  • The AMN model stands for analog and the DM model stands for digital.

AMN-100, DM-100

  • 13.56MHz /27.12MHz RF Power : 1~600W
  • Analog or Digital Auto RF matching algorithm with field validation
  • Support for a wide range of impedance RF matching for various plasma devices
  • Various functions such as sensor voltage, preset position cap position and motor volt

AMN-120, DM-120

  • 13.56MHz / RF Power : 1~1500W
  • Analog or Digiral Auto RF Matching Algorithm with Field Validation
  • Optional Output Type : Ceramic Insulator(Direct Type)
  • Easy control

AMN-130, DM-130

  • 13.56MHz / RF Power : 3000W
  • FULL DIGITAL RF MATCHER
  • NO Gear, Potentiometer and Brush Motor
  • Impedance control algorithm of proprietary technology (control software separately provided)

AMN-150, DM-150

  • 13.56MHz / RF Power : 5000W
  • FULL DIGITAL RF MATCHER
  • Optional Output Type : BAR TYPE(Vertical output)
  • Precise impedance control, AUTO RF MATCHING up to 3sec.
SPEC / MODEL AMN-100 AMN-120 AMN-130 AMN-150
RF POWER RANGE 0 ~ 600W 0 ~ 1500W 0 ~ 3000W 0 ~ 5000W
MATCHING METHOD 2AVC 1AVC & 1VVC 2VVC
FREQUENCY ±2MHz, 4MHz, 13.56MHz, 27.12MHz and 40.68MHz
INTPUT IMPEDANCE 50Ω
TUNING RANGE 10 ~ 1000Ω
RF INPUT CONNECTOR NR Din(7/17 Inch) Type
RF OUTPUT CONNECTOR CONNECTOR, CERAMIC, PAN Coil, Booth Bar TYPE
OPERATION MODE Manual & Digital Auto Tuning
TUNING TIME 2Sec preset
INDICATOR Capacitor Position (Load/Tune Position)
COOLING TYPE AIR AIR or WATER WATER